PL mapping system, mainly for compound semiconductor fast full chip Mapping design. The well-engineered NANOMETRICS enables the RPM BLUE FSM to achieve ultra-fast measurements without compromising spectral and spatial resolution. For example, a 1-mm space resolution on a 2-inch chip takes only 19 seconds to measure light intensity, meaning 2026 measurements can be done in less than 20 seconds; for full spectrum measurements, the same amount of space Resolution, just 25 seconds to complete the peak wavelength, peak intensity, half-width, integral strength and other parameters of the test.
The data is collected by R, θ, stored, and displayed in X, Y coordinate axes
data and images can be exported to other forms of software package
display ratio and color can be set by the user or the system default
Full spectrum scanning, simultaneous collection and display of peak wavelength, peak intensity, full width at half maximum, integrated intensity
Single-point spectrum display and storage can be performed on any point on the chip
Intensity spectra of 180 points per second or 2000 points per second can be collected
User-defined data filtering function
Statistics are displayed in numbers or in bar charts
Analysis of alloy composition
Automatic segmentation of system parameters and measurement parameters
Optional additional function options to complete the film thickness, Bragg reflector and VCSEL characteristics of the measurement
