The system have the powerful spectral analyse software, can measure multi-layer film, and n, k value.With the optional high sensetive camera, the system can measure the film thickness 70um. Meanwhile, the system has the 100x objective lens to achieve 0.75um spot size.
Wafer size: 3-8 inch
Spectral range: 380-850nm
Measurement range: 100Å-70um
Measurement repeatability: 0.1% or 2Å
