Accurate AFM system, with 100um*100um scan range;0.2nm resolution, suitable for 300mm wafer
AFM Scan Range：100um×100um×10um
AFM Scan Resolution：XY 向0.2nm，Z 向0.05nm
AFM Scan Speed：0.6Hz~4.34Hz
AFM Scan Angle：0~360°
Sample Size：Φ≤300mm，H≤20mm
Stage movement range：300mm×300mm
Profile line measurement length：1mm
