FilmTek™ Solar is an accurate and economical film thickness measurement system that is designed specifically for textured substrates. Unlike competing ellipsometer designs, no special stage tilting or sample alignment is necessary with FilmTek™ Solar. By combining a small measurement spot size with a large collection angle, superb signal to noise is obtained for rough and textured substrates without sample alignment. FilmTek™ software automatically models multiple reflections from textured monocrystalline silicon substrates to provide accurate film measurements. The FilmTek™ Solar is especially well suited for measuring anti-reflective coatings on textured silicon substrates (e.g., silicon nitride films deposited on monocrystalline silicon and polycrystalline silicon substrates).
Film thickness range: 3nm-150µm
Film thickness accuracy: ±2Å for NIST traceable standard oxide 1000Å to 1µm
Spectral range: 240nm-950nm
Measurement spot size: 1mm
Sample size: 2mm to 156mm standard
Spectral resolution: 0.3nm
Light source: Regulated deuterium-halogen lamp (2,000 hrs lifetime)
Detector type: 2048 pixel Sony linear CCD array
Reflection static repeatability @ 600nm (1s): 0.01%
Measurement time: <1 sec per site (e.g., oxide film)
Data acquisition time: 0.2 sec
Computer: Multi-core processor with Windows™ 7 Operating System
