he FilmTek™ 3000 combined reflection-transmission spectrophotometer provides efficient and accurate transmission and reflection measurement of unpatterned films deposited on transparent substrates. It is ideally suited for measuring the thickness and optical constants of very thin absorbing films.FilmTek™ 3000 is a fully-integrated package, combining DUV-NIR fiber-optic spectrophotometers, an automated stage, and advanced material modeling software to make even the most rigorous of measurement tasks reliable and intuitive.
Film thickness range: 3nm to 150µm
Film thickness accuracy: ±1.5Å for NIST traceable standard oxide 1000Å to 1µm
Spectral range: 220nm to 1700nm (240nm to 1000nm is standard)
Measurement spot size: 3mm
Sample size: 2mm to 500mm (150mm is standard. Larger stages upon request)
Spectral resolution: 0.3-2nm
Light source: Regulated deuterium-halogen lamp (2,000 hrs lifetime)
Detector type: 2048 pixel Sony linear CCD array / 512 pixel cooled Hamamatsu InGaAs CCD array (NIR)
Computer: Multi-core processor with Windows™ 7 Operating System
Measurement time: <1 sec per site (e.g., oxide film)
