Microscope based table-top system
Measurement of spectroscopic reflection at normal to the surface in the wavelength range of 400nm-950nm
Non-contact measurement, spot size down to 10um
Measurement of thickness, n(l), k(l), energy band gap, & multi-layers for films that show sensitivity in the visible range
Manual X-Y stage with knobs for 6” x 6” movement
Film thickness range: 5nm to 350µm (5nm to 150µm is standard)
Film thickness accuracy: ±1.5Å for NIST traceable standard oxide 1000Å to 1µm
CD precision (1σ): <0.2%
Spectral range: 380nm to 1700nm ( 380nm to 1000nm is standard)
Measurement spot size: 2µm (5×10µm standard with 10x objective)
Sample size: 2mm to 300mm (150mm is standard)
Spectral resolution: 0.3-2nm
Light source: Regulated halogen lamp (2,000 hrs lifetime)
Detector type: 2048 pixel Sony linear CCD array / 512 pixel cooled Hamamatsu InGaAs CCD array (NIR
