Spectral reflectance spectroscopy was used to generate visible light by using a built-in white light source. After the visible light was split by a grating, it was focused into a beam of less than 2 mm and vertically irradiated on the sample under test. The reflectance and transmission spectra were obtained by a CCD detector membrane thickness.
Film thickness test range: 10nm-150um
Film thickness test accuracy: 0.2nm, NIST standard oxide film
Reflectivity and transmissivity test repeatability 0.01% at 600 nm
Spectral range: 380nm-950nm
Test area diameter: 1mm
Sample size: 2mm to 300mm standard
Spectral resolution: 0.2nm
Light source: Regulated tungsten-halogen lamp (10,000 hrs lifetime)
Detector: 3648 pixel Toshiba linear CCD array
Test time: <1 sec per site (e.g., oxide film)
Data acquisition time: 0.2 sec
