Cresbox is a semi-automatic 4 point probe sheet resistance/resistivity measurement system by Napson.
User programable measurement pattern & programmable measuring pattern
Tester self-test function, wide measuring range
Thickness, edge, temperature correction for silicon wafer
Film thickness conversion function from sheet resistance
Sample sizes
~ 8 inch, ~156x156mm
Measuring range
[R] 1m~300k Ω・cm
[RS] 5m~10M Ω/sq
