Trek’s Model 640 Electrostatic Chuck Optimizer system is a diagnostic tool which enables evaluation and optimization of waveforms and voltages for electrostatic chucks/clamps in order to minimize de-clamp time, maximize clamp force, and achieve optimum wafer processing for ESC systems.
Output Voltage Range： 0 to ±2kV
Output Current Rangge：0 to6.5mA DC with a peak capability of 10 mA
Large Signal Bandwidth: DC to greater than 1.2 kHz(1% distortion)
Small Signal Bandwidth: DC to greater than 5 kHz(-3dB)
Slew rate:Greater than 15V/us
